Dr. Maxim Pisarenco
SPIE Involvement:
Publications (5)

SPIE Journal Paper | 28 April 2023 Open Access
JM3, Vol. 22, Issue 03, 031208, (April 2023) https://doi.org/10.1117/12.10.1117/1.JMM.22.3.031208
KEYWORDS: Scanning electron microscopy, Education and training, Semiconducting wafers, Electron microscopes, 3D scanning, Data modeling, Critical dimension metrology, Scatterometry, 3D metrology, 3D modeling

Proceedings Article | 27 April 2023 Poster + Presentation + Paper
Proceedings Volume 12496, 124961E (2023) https://doi.org/10.1117/12.2658094
KEYWORDS: Scanning electron microscopy, Line scan image sensors, Education and training, Simulations, Analytic models, Monte Carlo methods, Electron beams, Neural networks, Image analysis, Silicon

Proceedings Article | 5 March 2022 Paper
Proceedings Volume 12084, 120841I (2022) https://doi.org/10.1117/12.2622635
KEYWORDS: Data modeling, 3D modeling, Semiconducting wafers, Monte Carlo methods, Neural networks, Metrology, Semiconductors, Scanning electron microscopy, 3D metrology, Sensors

Proceedings Article | 13 May 2013 Paper
Proceedings Volume 8789, 87890K (2013) https://doi.org/10.1117/12.2020851
KEYWORDS: Electroluminescent displays, Maxwell's equations, Mathematical modeling, Stars, Numerical analysis, Process modeling, Scattering, Glasses, Analytical research, Inspection

Proceedings Article | 14 May 2010 Paper
Maxim Pisarenco, Joseph Maubach, Irwan Setija, Robert Mattheij
Proceedings Volume 7717, 77171H (2010) https://doi.org/10.1117/12.854420
KEYWORDS: Scattering, Diffraction gratings, Waveguides, Ordinary differential equations, Diffraction, Binary data, Refractive index, Superposition, Finite-difference time-domain method, Transmittance

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