Maxim Stolyarov
at Univ of California Riverside
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 5 December 2016
Proc. SPIE. 9927, Nanoengineering: Fabrication, Properties, Optics, and Devices XIII
KEYWORDS: Electronics, Metals, Copper, Dielectrics, Reliability, Atomic force microscopy, Scanning electron microscopy, Aluminum, Nanolithography, Nanowires

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