Cavity optomechanics have become a promising route towards the development of ultrasensitive sensors for a wide range of applications including mass, chemical and biological sensing. In this study, we demonstrate the potential of Very Large Scale Integration (VLSI) with state-of-the-art low-loss performance silicon optomechanical microdisks for sensing applications. We report microdisks exhibiting optical Whispering Gallery Modes (WGM) with 1 million quality factors, yielding high displacement sensitivity and strong coupling between optical WGMs and in-plane mechanical Radial Breathing Modes (RBM). Such high-Q microdisks with mechanical resonance frequencies in the 10<sup>2</sup> MHz range were fabricated on 200 mm wafers with Variable Shape Electron Beam lithography. Benefiting from ultrasensitive readout, their Brownian motion could be resolved with good Signal-to-Noise ratio at ambient pressure, as well as in liquid, despite high frequency operation and large fluidic damping: the mechanical quality factor reduced from few 10<sup>3</sup> in air to 10’s in liquid, and the mechanical resonance frequency shifted down by a few percent. Proceeding one step further, we performed an all-optical operation of the resonators in air using a pump-probe scheme. Our results show our VLSI process is a viable approach for the next generation of sensors operating in vacuum, gas or liquid phase.
A fundamental limitation of precision radial velocity measurements is the accuracy and stability of the calibration source. Here we present a low-cost alternative to more complex laser metrology based systems that utilises a single-mode fibre Fabry-Perot etalon. There are three key elements on this photonic comb: i) an optical fibre etalon with thermo-electric coolers; ii) a Rubidium Saturation Absorption Spectroscopy (SAS) setup; and iii) an optical fibre switch system for simultaneous laser locking of the etalon. We simultaneously measure the Rubidium D2 transitions around 780.2 nm and the closest etalon line. A PID loop controls the etalon temperate to maintain the position of its peak with an RMS error of <10cm/s for 10 minute integration intervals in continous operation. The optical fibre switch system allows for a time multiplexed coupling of the etalon to a spectrograph and SAS system.