This paper provides an overview of several on-going research projects on microreactors and microchemical systems in our group. Microchemical systems are a new generation of miniature chemical systems that carry out chemical reactions and separations in precisely fabricated three dimensional microreactor configurations in the size range of a few microns to a few hundred microns. Typical microchemical systems combine fluid handling and reaction
capabilities with electronic sensing and actuation, are fabricated using integrated circuit (IC) manufacturing techniques and use silicon and related IC industry materials, polymers, ceramics, glass or quartz as their material of construction. The use of such systems for in-situ and on-demand chemical production is gaining increasing
importance as the field of microreaction engineering transitions from a theoretical concept to a technology with significant industrial applications. The paper presents a review of our work on MEMS-based microfabrication, modeling and control of microreformers for hydrogen delivery systems in micro-fuel cells and suggests possible areas of future research.