Megan Bennett
at Brewer Science
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 12 March 2024 Poster + Paper
Yunyan Wang, Runhui Huang, Sean Simmons, Megan Bennett, Gu Xu
Proceedings Volume 12913, 129131E (2024) https://doi.org/10.1117/12.3000542
KEYWORDS: Microlens, Polymers, Refractive index, Semiconducting wafers, Film thickness, Plasma etching, Waveguides, Transparency, Thermal stability, Silicon, Polymer optics

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