Dr. Meghali C. Chopra
CEO
SPIE Involvement:
Author
Publications (11)

Proceedings Article | 25 March 2020 Paper
Proc. SPIE. 11329, Advanced Etch Technology for Nanopatterning IX
KEYWORDS: Etching, System on a chip, Silicon, Calibration, Model-based design, Argon, Optimization (mathematics), Critical dimension metrology, Semiconductors, Plasma etching

Proceedings Article | 23 March 2020 Presentation + Paper
Proc. SPIE. 11329, Advanced Etch Technology for Nanopatterning IX
KEYWORDS: Etching, Calibration, 3D modeling, Process modeling, Solid modeling, Silicon, Model-based design, Data modeling, 3D acquisition, Visual process modeling

Proceedings Article | 20 March 2019 Presentation + Paper
Proc. SPIE. 10963, Advanced Etch Technology for Nanopatterning VIII
KEYWORDS: Semiconducting wafers, Etching, Neural networks, Calibration, Process modeling, Cadmium sulfide, Critical dimension metrology, Plasma, Plasma etching, Data modeling

Proceedings Article | 20 March 2019 Presentation + Paper
Proc. SPIE. 10963, Advanced Etch Technology for Nanopatterning VIII
KEYWORDS: Etching, Calibration, Plasma etching, Amorphous silicon, Plasma, Manufacturing, Reactive ion etching, Analytics, Data modeling

Proceedings Article | 20 March 2018 Presentation + Paper
Proc. SPIE. 10589, Advanced Etch Technology for Nanopatterning VII
KEYWORDS: Etching, Chemical species, Focus stacking software, Silicon, Argon, Chlorine, Plasma, Ions, Surface roughness

Showing 5 of 11 publications
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