Dr. Mehdi Vaez-Iravani
VP of Technology at KLA-Tencor Corp
SPIE Involvement:
Conference Chair | Author
Publications (8)

SPIE Conference Volume | March 30, 1995

PROCEEDINGS ARTICLE | March 30, 1995
Proc. SPIE. 2384, Scanning Probe Microscopies III
KEYWORDS: Optical fibers, Microscopes, Birefringence, Polymers, Silicon, Image resolution, Near field scanning optical microscopy, Near field, Liquid crystals, Near field optics

PROCEEDINGS ARTICLE | May 1, 1994
Proc. SPIE. 2196, Integrated Circuit Metrology, Inspection, and Process Control VIII
KEYWORDS: Microscopes, Diffraction, Metrology, Metals, Glasses, Microscopy, Optical microscopy, Scanning electron microscopy, Near field scanning optical microscopy, Near field optics

PROCEEDINGS ARTICLE | August 4, 1993
Proc. SPIE. 1926, Integrated Circuit Metrology, Inspection, and Process Control VII
KEYWORDS: Prisms, Metrology, Calibration, Glasses, Scanners, Tungsten, Silicon, Interferometry, Atomic force microscopy, Atomic force microscope

SPIE Journal Paper | August 1, 1993
OE Vol. 32 Issue 08
KEYWORDS: Fiber optics, Interferometers, Signal detection, Modulators, Silicon, Michelson interferometers, Reflectivity, Calibration, Feedback loops, Heterodyning

PROCEEDINGS ARTICLE | June 4, 1993
Proc. SPIE. 1855, Scanning Probe Microscopies II
KEYWORDS: Diffraction, Phase contrast, Polarization, Imaging systems, Microscopy, Near field scanning optical microscopy, Near field, Scanning probe microscopy, Signal detection, Near field optics

Showing 5 of 8 publications
Conference Committee Involvement (1)
Scanning Probe Microscopies III
6 February 1995 | San Jose, CA, United States
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