In the analysis and modeling of MEMS devices, a general finite element formulation is necessary to solve a multidisciplinary
domain of the device with large number of nodes and elements.
In this paper, we present a step by step finite element formulation for automated modeling of multi-disciplinary domains.
The electro-thermo-mechanical domain is explained and an algorithmic approach for sequential analysis of an arbitrary
ground structure with multi-disciplinary boundaries is developed and implemented in Matlab with a graphical user
interface. The results of the finite element approach is compared and verified with exact solutions and test results from
literature. The agreement of results verifies the application of proposed finite element formulation to the analysis of
elector-thermo-mechanical domains.
This formulation provides a fast and reliable tool to analyze electro-thermo-elastic devices which allows large flexibility
in the selection of mechanical and electrical boundary conditions.
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