Dr. Meiliana Siauw
at Univ of Queensland
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 27 March 2017 Presentation + Paper
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Electron beam lithography, Refractive index, Polymers, Photoresist materials, Polymerization, Extreme ultraviolet, Absorbance, Extreme ultraviolet lithography, Semiconducting wafers, Polymer thin films

Proceedings Article | 21 March 2016 Paper
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Oxides, Electron beam lithography, Optical lithography, Nanoparticles, Metals, Particles, Materials processing, Scanning electron microscopy, Transmission electron microscopy, Photoresist materials, Extreme ultraviolet lithography, Hafnium, Zirconium, Photoresist developing

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top