Miss Mélanie Cloutier
Cleanroom Technician at Univ de Sherbrooke
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | May 11, 2010
Proc. SPIE. 7712, Nanophotonics III
KEYWORDS: Nanotechnology, Mirrors, Waveguides, Silicon, Reflectivity, Photonic crystals, Nanophotonics, Waveguide modes, Optical microcavities, Nanowires

PROCEEDINGS ARTICLE | May 20, 2004
Proc. SPIE. 5374, Emerging Lithographic Technologies VIII
KEYWORDS: Lithography, Electron beam lithography, Optical lithography, Etching, Nickel, Photomasks, Mask making, Plating, Reactive ion etching, Charged-particle lithography

PROCEEDINGS ARTICLE | May 14, 2004
Proc. SPIE. 5376, Advances in Resist Technology and Processing XXI
KEYWORDS: Lithography, Electron beam lithography, Electron beams, Etching, Silicon, Coating, Semiconductor lasers, Photomasks, Zone plates, Semiconducting wafers

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