Melissa V. Collins
at Sandia National Labs
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 2 October 2001
Proc. SPIE. 4558, Reliability, Testing, and Characterization of MEMS/MOEMS
KEYWORDS: Silicon, Semiconducting wafers, Glasses, Wafer bonding, Microelectromechanical systems, Packaging, Self-assembled monolayers, Contamination, Interfaces, Epoxies

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