Ms. Melkamu A. Belete
at
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Publications (1)

PROCEEDINGS ARTICLE | March 29, 2013
Proc. SPIE. 8685, Advanced Etch Technology for Nanopatterning II
KEYWORDS: Oxides, Lithography, Capacitors, Etching, Electrodes, Dielectrics, Reactive ion etching, Molybdenum, Semiconducting wafers, Tin

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