Meng H. Lee
at Veeco Instruments Inc
SPIE Involvement:
Publications (14)

Proceedings Article | 13 March 2024 Poster
Proceedings Volume PC12913, PC129130M (2024)
KEYWORDS: Etching, Reactive ion etching, Augmented reality, Semiconducting wafers, Optical gratings, Ion beams, Industrial applications, Blazed gratings, Wet etching, Waveguides

Proceedings Article | 22 November 2023 Presentation
Antonio Checco, Katrina Rook, Mohammad Saghayezhian, Kenji Yamamoto, Meng Lee, Ashish Kulkarni
Proceedings Volume PC12751, PC127510D (2023)
KEYWORDS: Reflectivity, Multilayers, Inhomogeneities, Extreme ultraviolet, EUV optics, Optical simulations, Imaging systems, Film thickness, Ion beams, Design and modelling

Proceedings Article | 22 November 2023 Poster
Mohammad Saghayezhian, Jojo Daof, Katrina Rook, Antonio Checco, Meng Lee, Marjorie Chee
Proceedings Volume PC12750, PC127500X (2023)
KEYWORDS: Extreme ultraviolet, Carbon, Diamond, Coating stress, Thin films, Optical properties, Film thickness, Extreme ultraviolet lithography, Tunable filters, Reticles

Proceedings Article | 21 November 2023 Presentation + Paper
Katrina Rook, Kenji Yamamoto, Mario Roque, Antonio Checco, Marjorie Chee, Meng Lee
Proceedings Volume 12751, 127510F (2023)
KEYWORDS: Extreme ultraviolet, Pellicles, Ion beams, Multilayers, Simulations, Silicon, Ruthenium, Photomasks, Molybdenum, Mirrors

Proceedings Article | 31 October 2022 Poster
Katrina Rook, Ashish Kulkarni, Antonio Checco, Kenji Yamamoto, Russell Luberoff, Mario Roque, Stephen Lozowski, Joel Bahena, Marjorie Chee, Meng Lee
Proceedings Volume PC12292, PC122920X (2022)
KEYWORDS: Extreme ultraviolet, High volume manufacturing, Ions, Ion beams, Silicon, Reflectivity, Photomasks, Motion controllers, Molybdenum, Manufacturing

Showing 5 of 14 publications
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