Meng Liu
at Brion Technologies (Shenzhen) Co Ltd
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 22 February 2021 Poster + Paper
Proc. SPIE. 11613, Optical Microlithography XXXIV
KEYWORDS: Lithography, Metrology, Calibration, Physics, Signal processing, Machine learning, Computational lithography, Optical proximity correction

Proceedings Article | 26 March 2019 Presentation + Paper
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Metrology, Data modeling, Calibration, Scanning electron microscopy, Time metrology, Neural networks, Optical proximity correction, Semiconducting wafers, Instrument modeling

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