Mengjiao Xia
at SIMIT
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 24 January 2013
Proc. SPIE. 8782, 2012 International Workshop on Information Storage and Ninth International Symposium on Optical Storage
KEYWORDS: Etching, Argon, Silicon, Surface roughness, Scanning electron microscopy, Photoemission spectroscopy, Reactive ion etching, Antimony, Tellurium, Plasma

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