Mengjun Li
at Rutgers State Univ of New Jersey
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 13, 2018
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Gold, Etching, Electrons, Ions, Silicon, Photoresist materials, Monte Carlo methods, Extreme ultraviolet lithography, Helium

PROCEEDINGS ARTICLE | March 21, 2016
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Electron beam lithography, Electrons, Ions, Silicon, Scanning helium ion microscopy, Monte Carlo methods, Extreme ultraviolet lithography, Helium, Line edge roughness, Ion beam lithography

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