Dr. Michael J. Anderson Profile

Dr. Michael J. Anderson

Optical Engineer at DuPont Electronics & Industrial

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 2 June 2003 Paper

Critical dimension metrology for sub-150-nm lithographic films using real-time scatterometry

Michael Anderson

Proceedings Volume 5038, (2003) https://doi.org/10.1117/12.488485

KEYWORDS: Semiconducting wafers, Critical dimension metrology, Scatterometry, Manufacturing, Metrology, Tolerancing, Databases, Lithography, Materials processing, Scanning electron microscopy

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Proceedings Article | 16 July 2002 Paper

Metrology of optical constants for sub-200-nm lithographic films

Michael Anderson, Eileen Clifford

Proceedings Volume 4689, (2002) https://doi.org/10.1117/12.473462

KEYWORDS: Semiconducting wafers, Mass attenuation coefficient, Manufacturing, Error analysis, Metrology, Tolerancing, Absorbance, Statistical analysis, Optical testing, Analytical research

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Proceedings Article | 21 May 1996 Paper

Comparison of particle measurement tools for use with photoresist: film surface versus liquid techniques

Michael Anderson, Susan Bablouzian, Michael Gaudet, Linda Kenyon, Pamela Turci

Proceedings Volume 2725, (1996) https://doi.org/10.1117/12.240083

KEYWORDS: Particles, Semiconducting wafers, Dye lasers, Photoresist materials, Laser scattering, Photoresist processing, Liquids, Manufacturing, Coating, Scattering

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Conference Committee Involvement (6)

Metrology, Inspection, and Process Control for Microlithography XXII

25 February 2008 | San Jose, California, United States

Metrology, Inspection, and Process Control for Microlithography XXI

26 February 2007 | San Jose, California, United States

Metrology, Inspection, and Process Control for Microlithography XX

20 February 2006 | San Jose, California, United States

Metrology, Inspection, and Process Control for Microlithography XIX

28 February 2005 | San Jose, California, United States

Metrology, Inspection, and Process Control for Microlithography XVIII

23 February 2004 | Santa Clara, California, United States

Showing 5 of 6 Conference Committees

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