Michael Bishop
Associate Engineer at SUNY Poly SEMATECH
SPIE Involvement:
Author
Publications (27)

PROCEEDINGS ARTICLE | August 24, 2010
Proc. SPIE. 7767, Instrumentation, Metrology, and Standards for Nanomanufacturing IV
KEYWORDS: Lithography, Microscopes, Metrology, Contamination, Calibration, Silicon, Electron microscopes, Scanning electron microscopy, Scatterometry, Standards development

PROCEEDINGS ARTICLE | June 3, 2010
Proc. SPIE. 7729, Scanning Microscopy 2010
KEYWORDS: Lithography, Metrology, Contamination, Calibration, Silicon, Electron microscopes, Scanning electron microscopy, Scatterometry, Electroluminescent displays, Standards development

PROCEEDINGS ARTICLE | April 2, 2010
Proc. SPIE. 7638, Metrology, Inspection, and Process Control for Microlithography XXIV
KEYWORDS: Lithography, Metrology, Contamination, Calibration, Silicon, Electron microscopes, Scanning electron microscopy, Scatterometry, Electroluminescent displays, Standards development

PROCEEDINGS ARTICLE | March 23, 2009
Proc. SPIE. 7272, Metrology, Inspection, and Process Control for Microlithography XXIII
KEYWORDS: Semiconductors, Nanotechnology, Metrology, Calibration, Scanners, Atomic force microscopy, Scanning electron microscopy, Profiling, Dimensional metrology, Standards development

SPIE Journal Paper | January 1, 2008
JM3 Vol. 7 Issue 01
KEYWORDS: Reflectivity, Diffraction, Silicon, Microscopy, Scanning electron microscopy, Optical testing, Objectives, Atomic force microscopy, Diffraction gratings, Microscopes

PROCEEDINGS ARTICLE | April 5, 2007
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Metrology, Calibration, Crystals, Silicon, Image resolution, Electron microscopes, Scanning electron microscopy, Transmission electron microscopy, Atomic force microscope, Standards development

Showing 5 of 27 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top