Michael Bishop
Associate Engineer at SUNY Poly SEMATECH
SPIE Involvement:
Author
Publications (27)

Proceedings Article | 24 August 2010 Paper
Proc. SPIE. 7767, Instrumentation, Metrology, and Standards for Nanomanufacturing IV
KEYWORDS: Lithography, Microscopes, Metrology, Contamination, Calibration, Silicon, Electron microscopes, Scanning electron microscopy, Scatterometry, Standards development

Proceedings Article | 3 June 2010 Paper
Proc. SPIE. 7729, Scanning Microscopy 2010
KEYWORDS: Lithography, Metrology, Contamination, Calibration, Silicon, Electron microscopes, Scanning electron microscopy, Scatterometry, Electroluminescent displays, Standards development

Proceedings Article | 2 April 2010 Paper
Proc. SPIE. 7638, Metrology, Inspection, and Process Control for Microlithography XXIV
KEYWORDS: Lithography, Metrology, Contamination, Calibration, Silicon, Electron microscopes, Scanning electron microscopy, Scatterometry, Electroluminescent displays, Standards development

Proceedings Article | 23 March 2009 Paper
Proc. SPIE. 7272, Metrology, Inspection, and Process Control for Microlithography XXIII
KEYWORDS: Semiconductors, Nanotechnology, Metrology, Calibration, Scanners, Atomic force microscopy, Scanning electron microscopy, Profiling, Dimensional metrology, Standards development

SPIE Journal Paper | 1 January 2008
JM3 Vol. 7 Issue 01
KEYWORDS: Reflectivity, Diffraction, Silicon, Microscopy, Scanning electron microscopy, Optical testing, Objectives, Atomic force microscopy, Diffraction gratings, Microscopes

Showing 5 of 27 publications
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