Michael J. Cangemi
at Corning Tropel Corp
SPIE Involvement:
Author
Publications (21)

Proceedings Article | 11 May 2017
Proc. SPIE. 10181, Advanced Optics for Defense Applications: UV through LWIR II
KEYWORDS: Mid-IR, Thin films, Refractive index, Deep ultraviolet, Optical properties, Ions, Optical coatings, Reflectivity, Surface roughness, Hafnium, Hybrid fiber optics, Plasma, Absorption

Proceedings Article | 20 October 2006
Proc. SPIE. 6349, Photomask Technology 2006
KEYWORDS: Lithography, Diffraction, Polarization, Manufacturing, Photomasks, Electron beam melting, Nanoimprint lithography, Semiconducting wafers, Binary data, Resolution enhancement technologies

Proceedings Article | 20 October 2006
Proc. SPIE. 6349, Photomask Technology 2006
KEYWORDS: Lithography, Metrology, Scanners, Manufacturing, Image acquisition, Data acquisition, Photomasks, Critical dimension metrology, Photoresist processing, Semiconducting wafers

Proceedings Article | 21 June 2006
Proc. SPIE. 6281, 22nd European Mask and Lithography Conference
KEYWORDS: Lithography, Optical lithography, Polarization, Etching, Manufacturing, Chromium, Photomasks, Plasma etching, Semiconducting wafers, Plasma

Proceedings Article | 21 June 2006
Proc. SPIE. 6281, 22nd European Mask and Lithography Conference
KEYWORDS: Lithography, Reticles, Polarization, Etching, Quartz, Manufacturing, Chromium, Photomasks, Semiconducting wafers, Phase shifts

Proceedings Article | 21 March 2006
Proc. SPIE. 6154, Optical Microlithography XIX
KEYWORDS: Lithography, Reticles, Optical lithography, Polarization, Birefringence, Wave plates, Pellicles, Photomasks, Critical dimension metrology, Fiber optic illuminators

Showing 5 of 21 publications
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