Dr. Michael Canonica Profile

Dr. Michael Canonica

PhD Student at Ecole Polytechnique Fédérale de Lausanne

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Publications (10)

Proceedings Article | 5 September 2019

Fully programmable micro diffraction grating for VIS and near-IR spectroscopic applications

R. Lockhart, B. Timotijevic, M. Canonica

Proc. SPIE. 10565, International Conference on Space Optics — ICSO 2010

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Proceedings Article | 20 November 2017

Large micromirror array for multi-object spectroscopy in space

Michael Canonica, Frédéric Zamkotsian, Patrick Lanzoni, Wilfried Noell

Proc. SPIE. 10564, International Conference on Space Optics — ICSO 2012

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Proceedings Article | 7 March 2014 Paper

Large array of 2048 tilting micromirrors for astronomical spectroscopy: optical and cryogenic characterization

Frédéric Zamkotsian, Michael Canonica, Patrick Lanzoni, Wilfried Noell, Sebastien Lani

Proc. SPIE. 8977, MOEMS and Miniaturized Systems XIII

KEYWORDS: Gold, Mirrors, Electrodes, Space telescopes, Micromirrors, Astronomical imaging, Molybdenum, Semiconducting wafers, Cryogenics, Wafer bonding

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Proceedings Article | 13 March 2013 Paper

Development of a fully programmable MEMS diffraction grating

F. Zamkotsian, B. Timotijevic, R. Lockhart, R. Stanley, P. Lanzoni, M. Luetzelschwab, M. Canonica, W. Noel, M. Tormen

Proc. SPIE. 8616, MOEMS and Miniaturized Systems XII

KEYWORDS: Microelectromechanical systems, Diffraction, Mirrors, Cameras, Electrodes, Silicon, Micromirrors, Microfabrication, Semiconducting wafers, Diffraction gratings

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Proceedings Article | 13 September 2012 Paper

Large micromirror array for generating programmable slit masks for multi-object spectroscopy

Michael Canonica, Frederic Zamkotsian, Patrick Lanzoni, Wilfried Noell, Nico de Rooij

Proc. SPIE. 8450, Modern Technologies in Space- and Ground-based Telescopes and Instrumentation II

KEYWORDS: Gold, Mirrors, Electrodes, Space telescopes, Micromirrors, Astronomical imaging, Molybdenum, Semiconducting wafers, Cryogenics, Wafer bonding

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Proceedings Article | 16 February 2012 Paper

Large MEMS-based programmable reflective slit mask for multi-object spectroscopy fabricated using multiple wafer-level bonding

Michael Canonica, Frederic Zamkotsian, Patrick Lanzoni, Wilfried Noell, Nico de Rooij

Proc. SPIE. 8252, MOEMS and Miniaturized Systems XI

KEYWORDS: Gold, Mirrors, Electrodes, Coating, Reflectivity, Micromirrors, Astronomical imaging, Semiconducting wafers, Cryogenics, Wafer bonding

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Proceedings Article | 14 February 2011 Paper

MEMS-based programmable reflective slit mask for multi-object spectroscopy

Michael Canonica, Frederic Zamkotsian, Patrick Lanzoni, Wilfried Noell, Nico de Rooij

Proc. SPIE. 7930, MOEMS and Miniaturized Systems X

KEYWORDS: Gold, Oxides, Mirrors, Electrodes, Micromirrors, Photomasks, Deep reactive ion etching, Astronomical imaging, Semiconducting wafers, Wafer bonding

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Proceedings Article | 20 July 2010 Paper

Development of MEMS-based programmable slit mask for multi-object spectroscopy

Michael Canonica, Severin Waldis, Frederic Zamkotsian, Patrick Lanzoni, Wilfried Noell, Nico De Rooij

Proc. SPIE. 7739, Modern Technologies in Space- and Ground-based Telescopes and Instrumentation

KEYWORDS: Mirrors, Electrodes, Silicon, Space telescopes, Micromirrors, Astronomical imaging, Infrared telescopes, Molybdenum, Spectroscopes, Cryogenics

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Proceedings Article | 17 February 2010 Paper

Realization and characterization of a MEMS-based programmable slit mask for multi-object spectroscopy

Michael Canonica, Severin Waldis, Frederic Zamkotsian, Patrick Lanzoni, Wilfried Noell, Nico de Rooij

Proc. SPIE. 7594, MOEMS and Miniaturized Systems IX

KEYWORDS: Mirrors, Electrodes, Silicon, Space telescopes, Micromirrors, Microfabrication, Astronomical imaging, Molybdenum, Semiconducting wafers, Cryogenics

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Proceedings Article | 24 February 2009 Paper

Large micromirror array for multi-object spectroscopy in a cryogenic environment

Michael Canonica, Severin Waldis, Frederic Zamkotsian, Patrick Lanzoni, Pierre-Andre Clerc, Wilfried Noell, Nico de Rooij

Proc. SPIE. 7208, MOEMS and Miniaturized Systems VIII

KEYWORDS: Telescopes, Mirrors, Electrodes, Silicon, Space telescopes, Micromirrors, Optical alignment, Astronomical imaging, Molybdenum, Cryogenics

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Showing 5 of 10 publications

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