Dr. Michael Canonica
PhD Student at Ecole Polytechnique Fédérale de Lausanne
SPIE Involvement:
Author
Publications (9)

PROCEEDINGS ARTICLE | November 20, 2017
Proc. SPIE. 10564, International Conference on Space Optics — ICSO 2012

PROCEEDINGS ARTICLE | March 7, 2014
Proc. SPIE. 8977, MOEMS and Miniaturized Systems XIII
KEYWORDS: Gold, Mirrors, Electrodes, Space telescopes, Micromirrors, Astronomical imaging, Molybdenum, Semiconducting wafers, Cryogenics, Wafer bonding

PROCEEDINGS ARTICLE | March 13, 2013
Proc. SPIE. 8616, MOEMS and Miniaturized Systems XII
KEYWORDS: Microelectromechanical systems, Diffraction, Mirrors, Cameras, Electrodes, Silicon, Micromirrors, Microfabrication, Semiconducting wafers, Diffraction gratings

PROCEEDINGS ARTICLE | September 13, 2012
Proc. SPIE. 8450, Modern Technologies in Space- and Ground-based Telescopes and Instrumentation II
KEYWORDS: Gold, Mirrors, Electrodes, Space telescopes, Micromirrors, Astronomical imaging, Molybdenum, Semiconducting wafers, Cryogenics, Wafer bonding

PROCEEDINGS ARTICLE | February 16, 2012
Proc. SPIE. 8252, MOEMS and Miniaturized Systems XI
KEYWORDS: Gold, Mirrors, Electrodes, Coating, Reflectivity, Micromirrors, Astronomical imaging, Semiconducting wafers, Cryogenics, Wafer bonding

PROCEEDINGS ARTICLE | February 14, 2011
Proc. SPIE. 7930, MOEMS and Miniaturized Systems X
KEYWORDS: Gold, Oxides, Mirrors, Electrodes, Micromirrors, Photomasks, Deep reactive ion etching, Astronomical imaging, Semiconducting wafers, Wafer bonding

Showing 5 of 9 publications
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