Dr. Michael R. Chandross
at Sandia National Labs
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | December 23, 2003
Proc. SPIE. 5343, Reliability, Testing, and Characterization of MEMS/MOEMS III
KEYWORDS: Microelectromechanical systems, Carbon, Silica, Chemical species, Error analysis, Crystals, Silicon, Hydrogen, Oxygen, Self-assembled monolayers

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