Michael Anthony Creighton
Staff Engineer at Intel Corp
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 12 May 2005 Paper
Proc. SPIE. 5754, Optical Microlithography XVIII
KEYWORDS: Lithography, Diffraction, Optical lithography, Lithographic illumination, Data modeling, Metals, Fourier transforms, Projection systems, Illumination engineering, Phase shifts

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