Mr. Michael Grumski Profile

Michael Grumski

Engineer at Intel Corp

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 24 May 2004 Paper

Prospects for using primary electron-based CD metrology

Bryan Rice, Gary Crays, Alex Danilevsky, Michael Grumski, Shunsuke Koshihara, Tadashi Otaka, Jeanette Roberts

Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.544232

KEYWORDS: Control systems, Scanning electron microscopy, Critical dimension metrology, Semiconducting wafers, Metrology, Image processing, Transistors, Oxides, Silicon, Semiconductors

Read Abstract +

Proceedings Article | 24 May 2004 Paper

CD metrology for the 45-nm and 32-nm nodes

Bryan Rice, Heidi Cao, Ovijut Chaudhuri, Michael Grumski, Bruce Harteneck, Alex Liddle, Deidre Olynick, Jeanette Roberts

Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.536071

KEYWORDS: Critical dimension metrology, Scanning electron microscopy, Semiconducting wafers, Metrology, Scatterometry, Silicon, Atomic force microscopy, Semiconductors, Manufacturing, Ion beams

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years