Michael D. Hyatt
Senior Engineer at Micron Technology Inc
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 27 March 2014
Proc. SPIE. 9051, Advances in Patterning Materials and Processes XXXI
KEYWORDS: Lithography, Optical lithography, Etching, Coating, Photoresist materials, Line width roughness, Double patterning technology, Photoresist processing, Semiconducting wafers, Plasma

Proceedings Article | 16 April 2011
Proc. SPIE. 7972, Advances in Resist Materials and Processing Technology XXVIII
KEYWORDS: Reticles, Contamination, Cadmium, Manufacturing, Imaging devices, Critical dimension metrology, Photoresist processing, Semiconducting wafers, Testing and analysis, Chemically amplified resists

Proceedings Article | 4 March 2010
Proc. SPIE. 7640, Optical Microlithography XXIII
KEYWORDS: Data modeling, Calibration, Scanners, Computer simulations, Finite element methods, Computational lithography, Critical dimension metrology, Optimization (mathematics), Semiconducting wafers, Thermal modeling

Proceedings Article | 4 March 2010
Proc. SPIE. 7640, Optical Microlithography XXIII
KEYWORDS: Wafer-level optics, Metrology, Data modeling, Calibration, Scanners, Optical simulations, Critical dimension metrology, Semiconducting wafers, Optics manufacturing, Performance modeling

Proceedings Article | 23 March 2007
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: Thin films, Lithography, Lithographic illumination, Interferometers, Etching, Scanners, Silicon, Scanning electron microscopy, Immersion lithography, Line edge roughness

Proceedings Article | 29 March 2006
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Carbon, Thin films, Lithography, FT-IR spectroscopy, Etching, Silicon, Scanning electron microscopy, Photoresist processing, Plasma, Oxidation

Showing 5 of 6 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top