Michael B. Jacobsson
at Univ of Texas at Austin
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | April 4, 2011
Proc. SPIE. 7970, Alternative Lithographic Technologies III
KEYWORDS: Lithography, Optical lithography, Glasses, Interfaces, Silicon, Nanoimprint lithography, Head-mounted displays, Fluorine, Adhesives, Information operations

PROCEEDINGS ARTICLE | April 3, 2010
Proc. SPIE. 7637, Alternative Lithographic Technologies II
KEYWORDS: Lithography, Etching, Ultraviolet radiation, Silicon, Coating, Oxygen, Scanning electron microscopy, Epoxies, Silicon carbide, Liquids

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