Dr. Michael Jordan
Principal at Colibre Solutions
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | 1 February 2002
OE Vol. 41 Issue 02
KEYWORDS: Sensors, Scattering, Scatter measurement, Light scattering, Semiconducting wafers, Silicon, Particles, Optical engineering, Diffraction, Wafer-level optics

Proceedings Article | 5 June 2001 Paper
Proc. SPIE. 4275, Metrology-based Control for Micro-Manufacturing
KEYWORDS: Wafer-level optics, Data modeling, Scattering, Sensors, Particles, Silicon, Light scattering, Wafer inspection, Semiconducting wafers, Scatter measurement

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