Mr. Michael B. Krell Profile

Michael B. Krell

at Zygo Corporation

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 22 January 2005 Paper

Surface profiler for fixed through-glass measurement

Sen Han, Erik Novak, John Wissinger, Bryan Guenther, Trisha Browne, Emilio Yanine, Michael Schurig, J. Herron, Christy McCloy, Xueyuan Li, Michael Krell, Jim Harris

Proceedings Volume 5716, (2005) https://doi.org/10.1117/12.597080

KEYWORDS: Glasses, Microelectromechanical systems, Interferometry, Profilometers, Objectives, Mirrors, Tolerancing, Microopto electromechanical systems, Silicon, Image quality standards

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Proceedings Article | 22 December 2003 Paper

Calibration of high-speed optical profiler

Joanna Schmit, Michael Krell, Erik Novak

Proceedings Volume 5180, (2003) https://doi.org/10.1117/12.504930

KEYWORDS: Calibration, Scanners, Interferometers, Interferometry, Optical calibration, Signal detection, Motion measurement, Objectives, Standards development, Optical filters

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Proceedings Article | 16 January 2003 Paper

Template-based software for accurate MEMS characterization

Erik Novak, Michael Krell, Trisha Browne

Proceedings Volume 4980, (2003) https://doi.org/10.1117/12.478204

KEYWORDS: Microelectromechanical systems, Image segmentation, Metrology, Measurement devices, Sensors, Micromirrors, Microscopes, Error analysis, Interferometry, Motion measurement

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