Michael B. Krell
at Zygo Corporation
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | January 22, 2005
Proc. SPIE. 5716, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV
KEYWORDS: Microelectromechanical systems, Mirrors, Glasses, Silicon, Interferometry, Profilometers, Objectives, Microopto electromechanical systems, Tolerancing, Image quality standards

PROCEEDINGS ARTICLE | December 22, 2003
Proc. SPIE. 5180, Optical Manufacturing and Testing V
KEYWORDS: Optical filters, Interferometers, Calibration, Scanners, Interferometry, Objectives, Motion measurement, Optical calibration, Signal detection, Standards development

PROCEEDINGS ARTICLE | January 16, 2003
Proc. SPIE. 4980, Reliability, Testing, and Characterization of MEMS/MOEMS II
KEYWORDS: Microelectromechanical systems, Microscopes, Metrology, Sensors, Image segmentation, Error analysis, Interferometry, Micromirrors, Measurement devices, Motion measurement

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top