Dr. Michael D. Kriese
Coatings Scientist at Rigaku Innovative Technologies Inc
SPIE Involvement:
Author
Publications (12)

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Scattering, Scanners, Diffusers, Extreme ultraviolet, Extreme ultraviolet lithography, Molybdenum

PROCEEDINGS ARTICLE | October 16, 2017
Proc. SPIE. 10450, International Conference on Extreme Ultraviolet Lithography 2017
KEYWORDS: Optical design, Multilayers, Optical spheres, Modulation, Optical coatings, Aspheric optics, Aspheric lenses, Extreme ultraviolet lithography, Optical arrays, EUV optics

PROCEEDINGS ARTICLE | March 16, 2015
Proc. SPIE. 9422, Extreme Ultraviolet (EUV) Lithography VI
KEYWORDS: Oxides, Multilayers, Annealing, Silicon, Resistance, Reflectivity, Reflectometry, Extreme ultraviolet, Extreme ultraviolet lithography, Oxidation

PROCEEDINGS ARTICLE | April 17, 2014
Proc. SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V
KEYWORDS: Data modeling, Polarization, Sensors, Reflectivity, 3D modeling, Reflectometry, Extreme ultraviolet, Radiation effects, Motion models, EUV optics

PROCEEDINGS ARTICLE | March 18, 2014
Proc. SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V
KEYWORDS: Nickel, Reflectivity, Infrared radiation, Extreme ultraviolet, Extreme ultraviolet lithography, Infrared technology, Neodymium, Surface finishing, Plasma, Diffraction gratings

PROCEEDINGS ARTICLE | May 4, 2011
Proc. SPIE. 8076, EUV and X-Ray Optics: Synergy between Laboratory and Space II
KEYWORDS: Mirrors, Multilayers, X-ray optics, Sputter deposition, Reflectivity, Extreme ultraviolet, Boron, Extreme ultraviolet lithography, Lanthanum, Laser beam diagnostics

Showing 5 of 12 publications
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