Dr. Michael D. Kriese
Coatings Scientist at Rigaku Innovative Technologies
SPIE Involvement:
Publications (13)

Proceedings Article | 26 March 2019 Paper
Proceedings Volume 10957, 109571I (2019) https://doi.org/10.1117/12.2514989
KEYWORDS: Multilayers, Extreme ultraviolet, Reflectivity, Extreme ultraviolet lithography, Chromium, Scattering, Optical coatings, EUV optics, Reflection

Proceedings Article | 19 March 2018 Presentation + Paper
Mark van de Kerkhof, Robbert Jan Voogd, Ad Schasfoort, Evert Westerhuis, Wouter Engelen, Manfred Dikkers, Yassin Chowdhury, Michael Kriese, Stefan Bäumer, Uwe Zeitner, Torsten Feigl
Proceedings Volume 10583, 105830S (2018) https://doi.org/10.1117/12.2297433
KEYWORDS: Diffusers, Extreme ultraviolet, Scanners, Scattering, Extreme ultraviolet lithography, Molybdenum

Proceedings Article | 16 October 2017 Paper
Proceedings Volume 10450, 1045025 (2017) https://doi.org/10.1117/12.2281646
KEYWORDS: Multilayers, Optical spheres, Optical coatings, Optical design, EUV optics, Aspheric lenses, Extreme ultraviolet lithography, Optical arrays, Aspheric optics, Modulation

Proceedings Article | 16 March 2015 Paper
Proceedings Volume 9422, 94220K (2015) https://doi.org/10.1117/12.2085934
KEYWORDS: Multilayers, Reflectivity, Extreme ultraviolet lithography, Extreme ultraviolet, Annealing, Resistance, Oxides, Reflectometry, Silicon, Oxidation

Proceedings Article | 17 April 2014 Paper
Proceedings Volume 9048, 90481I (2014) https://doi.org/10.1117/12.2046290
KEYWORDS: Sensors, Extreme ultraviolet, Reflectometry, Polarization, Radiation effects, Reflectivity, Motion models, EUV optics, 3D modeling, Data modeling

Showing 5 of 13 publications
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