Dr. Michael Krumrey
at Physikalisch Technische Bundesanstalt
SPIE Involvement:
Author
Publications (66)

PROCEEDINGS ARTICLE | November 20, 2017
Proc. SPIE. 10564, International Conference on Space Optics — ICSO 2012

PROCEEDINGS ARTICLE | October 16, 2017
Proc. SPIE. 10451, Photomask Technology
KEYWORDS: Semiconductors, Metrology, Scattering, X-rays, Laser scattering, Time metrology, Grazing incidence, Semiconducting wafers, Scatter measurement, Absorption

PROCEEDINGS ARTICLE | October 16, 2017
Proc. SPIE. 10451, Photomask Technology
KEYWORDS: Wafer-level optics, Carbon, Particles, Reflectivity, Pellicles, Transmittance, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, EUV optics

PROCEEDINGS ARTICLE | September 8, 2017
Proc. SPIE. 10399, Optics for EUV, X-Ray, and Gamma-Ray Astronomy VIII
KEYWORDS: X-ray optics, Metrology, Sensors, X-rays, Silicon, Geometrical optics, Algorithm development, X-ray detectors, Optics manufacturing, X-ray characterization

PROCEEDINGS ARTICLE | August 29, 2017
Proc. SPIE. 10399, Optics for EUV, X-Ray, and Gamma-Ray Astronomy VIII
KEYWORDS: Semiconductors, Telescopes, Mirrors, X-ray optics, X-rays, Silicon, Spatial resolution, X-ray astronomy, X-ray telescopes, High energy astrophysics

PROCEEDINGS ARTICLE | August 29, 2017
Proc. SPIE. 10399, Optics for EUV, X-Ray, and Gamma-Ray Astronomy VIII
KEYWORDS: Mirrors, X-ray optics, Metrology, Titanium, X-rays, Interfaces, Manufacturing, Aluminum, Optical alignment, Mirror structures

Showing 5 of 66 publications
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