Michael P. Larsson
at
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 5 January 2006
Proc. SPIE. 6035, Microelectronics: Design, Technology, and Packaging II
KEYWORDS: Microelectromechanical systems, Gold, Nickel, Coating, Resistance, Surface roughness, Connectors, Plating, Tolerancing, Temperature metrology

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