Mr. Michael Lering Profile

Michael Lering

at Advanced Mask Technology Ctr

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 20 October 2006 Paper

Dirk Helmholz, Michael Lering

Proceedings Volume 6349, 634952 (2006) https://doi.org/10.1117/12.685926

KEYWORDS: Reticles, Inspection, Domes, Electrodes, Lithium, Polymers, Resistance, Optical microscopes, Photomasks, Metals

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Keywords/Phrases