Dr. Michael W. Lin
Graduate Research Assistant at Univ of Texas at Austin
SPIE Involvement:
Publications (11)

SPIE Journal Paper | 16 July 2014
JM3 Vol. 13 Issue 03
KEYWORDS: Etching, Ultraviolet radiation, Lithography, Silicon, Scanning electron microscopy, Industrial chemicals, Coating, Liquids, Plasma etching, Epoxies

SPIE Journal Paper | 24 September 2013
JM3 Vol. 12 Issue 03
KEYWORDS: Lithography, Head-mounted displays, Glasses, Optical lithography, Microfluidics, Nanoimprint lithography, Interfaces, Natural surfaces, Chemistry, Failure analysis

Proceedings Article | 4 April 2011 Paper
Proc. SPIE. 7970, Alternative Lithographic Technologies III
KEYWORDS: Lithography, Optical lithography, Glasses, Interfaces, Silicon, Nanoimprint lithography, Head-mounted displays, Fluorine, Adhesives, Information operations

Proceedings Article | 3 April 2010 Paper
Proc. SPIE. 7637, Alternative Lithographic Technologies II
KEYWORDS: Lithography, Etching, Ultraviolet radiation, Silicon, Coating, Oxygen, Scanning electron microscopy, Epoxies, Silicon carbide, Liquids

Proceedings Article | 1 April 2009 Paper
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Lithography, Antireflective coatings, Etching, Ultraviolet radiation, Dielectrics, Coating, Chemical analysis, Semiconducting wafers, Industrial chemicals, Liquids

Showing 5 of 11 publications
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