Prof. Michael A. Morris
at Univ College Cork
SPIE Involvement:
Author
Publications (10)

PROCEEDINGS ARTICLE | July 26, 2016
Proc. SPIE. 9885, Photonic Crystal Materials and Devices XII
KEYWORDS: Infrared cameras, Photonic devices, Nanostructures, Polymers, Silicon, Manufacturing, Reflectivity, Photonic crystals, Nanolithography, Molecular self-assembly

PROCEEDINGS ARTICLE | March 27, 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Lithography, Statistical analysis, Error analysis, Silicon, Image analysis, Scanning electron microscopy, Dimensional metrology, Directed self assembly, Optical alignment, Imaging arrays

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Imaging systems, Polymers, Electrons, Ions, Atomic force microscopy, Scanning electron microscopy, Scanning helium ion microscopy, Photomasks, Picosecond phenomena, Neodymium

PROCEEDINGS ARTICLE | June 25, 2014
Proc. SPIE. 9083, Micro- and Nanotechnology Sensors, Systems, and Applications VI
KEYWORDS: Thin films, Nanostructures, Scattering, Annealing, Silicon, Scanning electron microscopy, Silicon films, Directed self assembly, Picosecond phenomena, Nanoimprint lithography

PROCEEDINGS ARTICLE | June 4, 2014
Proc. SPIE. 9083, Micro- and Nanotechnology Sensors, Systems, and Applications VI
KEYWORDS: Oxides, Nanostructures, Optical lithography, Sensors, Polymers, Metals, Silicon, Silver, Bioalcohols, Scanning electron microscopy

PROCEEDINGS ARTICLE | May 28, 2014
Proc. SPIE. 9110, Dimensional Optical Metrology and Inspection for Practical Applications III
KEYWORDS: Lithography, Statistical analysis, Annealing, Error analysis, Silicon, Image analysis, Scanning electron microscopy, Directed self assembly, Picosecond phenomena, Optical alignment

Showing 5 of 10 publications
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