Michael J. O'Leary
at Waters Corp
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | June 14, 1996
Proc. SPIE. 2724, Advances in Resist Technology and Processing XIII
KEYWORDS: Dielectrics, Ions, Nitrogen, Oxygen, Cobalt, Carbonates, Solids, Chemical reactions, Sodium, Temperature metrology

PROCEEDINGS ARTICLE | June 9, 1995
Proc. SPIE. 2438, Advances in Resist Technology and Processing XII
KEYWORDS: Carbon, Optical lithography, Sensors, Calibration, Nitrogen, Manufacturing, Control systems, Chemical analysis, Manganese, Chromatography

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