Mr. Michael C. Schmittdiel
at Georgia Institute of Technology
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | January 22, 2005
Proc. SPIE. 5721, MOEMS Display and Imaging Systems III
KEYWORDS: Microelectromechanical systems, Actuators, Metrology, Modulation, Interferometers, Sensors, Control systems, Microlens, Measurement devices, Diffraction gratings

PROCEEDINGS ARTICLE | January 24, 2004
Proc. SPIE. 5348, MOEMS Display and Imaging Systems II
KEYWORDS: Microelectromechanical systems, Actuators, Optical design, Interferometers, Electrodes, Control systems, Microfabrication, Semiconducting wafers, Signal detection, Diffraction gratings

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