Mr. Michael Sendler Profile

Michael Sendler

President, US & EU Operations at Nova Measuring Instruments Inc

SPIE Involvement:

Author

Publications (5)

SPIE Journal Paper | 1 October 2011

Holistic metrology approach: hybrid metrology utilizing scatterometry, critical dimension-atomic force microscope and critical dimension-scanning electron microscope

Alok Vaid, Bin Bin Yan, Yun Tao Jiang, Mark Kelling, Carsten Hartig, John Allgair, Peter Ebersbach, Matthew Sendelbach, Narender Rana, Ahmad Katnani, Erin McLellan, Charles Archie, Cornel Bozdog, Helen Kim, Michael Sendler, Susan Ng, Boris Sherman, Boaz Brill, Igor Turovets, Ronen Urensky

JM3, Vol. 10, Issue 04, 043016, (October 2011) https://doi.org/10.1117/12.10.1117/1.3655726

KEYWORDS: Metrology, Scatterometry, Critical dimension metrology, Semiconducting wafers, Data modeling, Atomic force microscopy, Transmission electron microscopy, Inspection, 3D metrology

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Proceedings Article | 29 March 2011 Paper

A holistic metrology approach: hybrid metrology utilizing scatterometry, CD-AFM, and CD-SEM

Alok Vaid, Bin Bin Yan, Yun Tao Jiang, Mark Kelling, Carsten Hartig, John Allgair, Peter Ebersbach, Matthew Sendelbach, Narender Rana, Ahmad Katnani, Erin Mclellan, Chas Archie, Cornel Bozdog, Helen Kim, Michael Sendler, Susan Ng, Boris Sherman, Boaz Brill, Igor Turovets, Ronen Urensky

Proceedings Volume 7971, 797103 (2011) https://doi.org/10.1117/12.881632

KEYWORDS: Metrology, Critical dimension metrology, Scatterometry, Semiconducting wafers, Metals, Transmission electron microscopy, Data modeling, Atomic force microscopy, Inspection

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SPIE Journal Paper | 1 October 2010

Simultaneous measurement of optical properties and geometry of resist using multiple scatterometry targets

Alok Vaid, Matthew Sendelbach, Daniel Moore, Timothy Brunner, Nelson Felix, Pawan Rawat, Cornel Bozdog, Hyang Kyun Kim, Michael Sendler, Stanislav Stepanov, Victor Kucerov

JM3, Vol. 9, Issue 04, 041306, (October 2010) https://doi.org/10.1117/12.10.1117/1.3514707

KEYWORDS: Scatterometry, Semiconducting wafers, Optical properties, Critical dimension metrology, Optical testing, Finite element methods, Diffractive optical elements, Lithography, Data modeling, Metrology

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Proceedings Article | 2 April 2010 Paper

Simultaneous measurement of optical properties and geometry of resist using multiple scatterometry gratings

Alok Vaid, Matthew Sendelbach, Daniel Moore, Timothy Brunner, Nelson Felix, Pawan Rawat, Cornel Bozdog, Helen Kim, Michael Sendler, Stanislav Stepanov, Victor Kucerov

Proceedings Volume 7638, 76381H (2010) https://doi.org/10.1117/12.846648

KEYWORDS: Scatterometry, Finite element methods, Semiconducting wafers, Optical properties, Critical dimension metrology, Diffractive optical elements, Metrology, Data modeling, Optical testing, Scatter measurement

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Proceedings Article | 23 March 2009 Paper

Product-driven material characterization for improved scatterometry time-to-solution

Alok Vaid, Carsten Hartig, Matthew Sendelbach, Cornel Bozdog, Hyang Kyun Kim, Michael Sendler, Yoel Cohen, Victor Kucherov, Boaz Brill, Stanislav Stepanov

Proceedings Volume 7272, 72720V (2009) https://doi.org/10.1117/12.814380

KEYWORDS: Scatterometry, Material characterization, Optical properties, Semiconducting wafers, Metals, Critical dimension metrology, Etching, Silicon, Metrology, Wafer-level optics

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