Dr. Michael J. Shaw
Member Technical Staff at Sandia National Labs
SPIE Involvement:
Author
Publications (8)

PROCEEDINGS ARTICLE | March 18, 2016
Proc. SPIE. 9766, Vertical-Cavity Surface-Emitting Lasers XX
KEYWORDS: Vertical cavity surface emitting lasers, Sensors, Microelectromechanical systems, Interferometry, Interferometers, Integrated optics, Microopto electromechanical systems, Gyroscopes, Capacitance, Motion measurement, Mirrors, Diffraction gratings, Michelson interferometers, Diffraction

PROCEEDINGS ARTICLE | April 29, 2010
Proc. SPIE. 7683, Energy Harvesting and Storage: Materials, Devices, and Applications
KEYWORDS: Transmission electron microscopy, Electrodes, Lithium, Liquids, Silicon, Dielectrophoresis, Nanolithography, Particles, Microelectromechanical systems, Nanowires

PROCEEDINGS ARTICLE | February 16, 2010
Proc. SPIE. 7605, Optoelectronic Integrated Circuits XII
KEYWORDS: Sensors, Waveguides, Resonators, Microrings, Refractive index, Microfluidics, Etching, Servomechanisms, Multiplexing, Liquids

PROCEEDINGS ARTICLE | February 19, 2009
Proc. SPIE. 7194, Laser Resonators and Beam Control XI
KEYWORDS: Sensors, Silicon, Resonators, Microrings, Waveguides, Thermography, Oxides, Thermal optics, Phonons, Microbolometers

PROCEEDINGS ARTICLE | February 6, 2008
Proc. SPIE. 6883, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics
KEYWORDS: Silicon, Microrings, Oxides, Waveguides, Resonators, Sensors, Etching, Computer aided design, Silica, Photomasks

PROCEEDINGS ARTICLE | March 31, 2005
Proc. SPIE. 5728, Integrated Optics: Devices, Materials, and Technologies IX
KEYWORDS: Microrings, Resonators, Waveguides, Silicon, Cladding, Liquids, Sensors, Semiconducting wafers, Mach-Zehnder interferometers, Silica

Showing 5 of 8 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top