Dr. Michael J. Shaw
Member Technical Staff at Sandia National Labs
SPIE Involvement:
Publications (8)

Proceedings Article | 18 March 2016
Proc. SPIE. 9766, Vertical-Cavity Surface-Emitting Lasers XX
KEYWORDS: Microelectromechanical systems, Diffraction, Mirrors, Interferometers, Sensors, Interferometry, Capacitance, Microopto electromechanical systems, Integrated optics, Vertical cavity surface emitting lasers, Gyroscopes, Motion measurement, Michelson interferometers, Diffraction gratings

Proceedings Article | 29 April 2010
Proc. SPIE. 7683, Energy Harvesting and Storage: Materials, Devices, and Applications
KEYWORDS: Microelectromechanical systems, Lithium, Electrodes, Particles, Silicon, Dielectrophoresis, Transmission electron microscopy, Nanolithography, Liquids, Nanowires

Proceedings Article | 16 February 2010
Proc. SPIE. 7605, Optoelectronic Integrated Circuits XII
KEYWORDS: Refractive index, Microfluidics, Resonators, Waveguides, Sensors, Etching, Multiplexing, Servomechanisms, Microrings, Liquids

Proceedings Article | 19 February 2009
Proc. SPIE. 7194, Laser Resonators and Beam Control XI
KEYWORDS: Microbolometers, Oxides, Thermography, Thermal optics, Resonators, Waveguides, Sensors, Silicon, Phonons, Microrings

Proceedings Article | 6 February 2008
Proc. SPIE. 6883, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics
KEYWORDS: Oxides, Resonators, Silica, Waveguides, Sensors, Etching, Silicon, Photomasks, Computer aided design, Microrings

Showing 5 of 8 publications
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