Prof. Michael S. Shur
Professor
SPIE Involvement:
Author
Publications (69)

Proceedings Article | 2 March 2020
Proc. SPIE. 11279, Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XIII
KEYWORDS: Plasmonics, Electronics, Sensors, Crystals, Silicon, Terahertz radiation, Transistors, Field effect transistors, Millimeter wave sensors, Plasma

SPIE Journal Paper | 5 December 2019
OE Vol. 59 Issue 06
KEYWORDS: Heterojunctions, Optical pumping, Plasma, Optical engineering, Photons, Phonons, Electrons, Plasmons, Graphene, Arsenic

Proceedings Article | 13 May 2019
Proc. SPIE. 10982, Micro- and Nanotechnology Sensors, Systems, and Applications XI
KEYWORDS: Plasmonics, Electronics, Imaging systems, Sensors, Remote sensing, Silicon, Terahertz radiation, Very large scale integration, Field effect transistors, Plasma

Proceedings Article | 13 May 2019
Proc. SPIE. 10982, Micro- and Nanotechnology Sensors, Systems, and Applications XI
KEYWORDS: Plasmonics, Photonic devices, Resonators, Waveguides, Sensors, Polymers, Imaging devices, Terahertz radiation, Antennas, Microrings

Proceedings Article | 15 March 2019
Proc. SPIE. 11022, International Conference on Micro- and Nano-Electronics 2018
KEYWORDS: Plasmonics, Antireflective coatings, Principal component analysis, Electrodes, Metals, Silicon, Terahertz radiation, Aluminum, Antennas, Superlattices

Showing 5 of 69 publications
Proceedings Volume Editor (2)

SPIE Conference Volume | 26 September 2007

SPIE Conference Volume | 12 October 2006

Conference Committee Involvement (11)
Micro- and Nanotechnology Sensors, Systems, and Applications XI
14 April 2019 | Baltimore, Maryland, United States
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV
10 December 2008 | Melbourne, Australia
Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV
5 December 2007 | Canberra, ACT, Australia
Terahertz Physics, Devices, and Systems II
11 September 2007 | Boston, MA, United States
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III
11 December 2006 | Adelaide, Australia
Showing 5 of 11 Conference Committees
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