Dr. Michael Smith
at Ecole Polytechnique Fédérale de Lausanne
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 18 April 2022 Presentation
Proceedings Volume PC12042, PC120420A (2022) https://doi.org/10.1117/12.2615068
KEYWORDS: Actuators, Silicon, Liquids, Dielectrics

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