Dr. Michael D. Stewart
Project Coordinator/Research Fellowr at Canon Nanotechnologies Inc
SPIE Involvement:
Publications (13)

Proceedings Article | 21 March 2007 Paper
Jianjun Hao, Michael Lin, Frank Palmieri, Yukio Nishimura, Huang-Lin Chao, Michael Stewart, Austin Collins, Kane Jen, C. Grant Willson
Proceedings Volume 6517, 651729 (2007) https://doi.org/10.1117/12.712261
KEYWORDS: Silicon, Dielectrics, Molecules, Lithography, Annealing, Bromine, Front end of line, Back end of line, Chlorine, Optical lithography

Proceedings Article | 23 March 2006 Paper
Frank Palmieri, Michael Stewart, Jeff Wetzel, Jianjun Hao, Yukio Nishimura, Kane Jen, Colm Flannery, Bin Li, Huang-Lin Chao, Soo Young, Woon Kim, Paul Ho, C. Willson
Proceedings Volume 6151, 61510J (2006) https://doi.org/10.1117/12.655604
KEYWORDS: Dielectrics, Copper, Sol-gels, Polymers, Silicon, Optical lithography, Chemical mechanical planarization, Liquids, Polymerization, Lithography

Proceedings Article | 8 November 2005 Paper
Proceedings Volume 5992, 59922F (2005) https://doi.org/10.1117/12.632312
KEYWORDS: Metals, Etching, Quartz, Copper, Photomasks, Optical lithography, Manufacturing, Lithography, Semiconducting wafers, Dielectrics

Proceedings Article | 6 May 2005 Paper
Michael Stewart, Jeffery Wetzel, Gerard Schmid, Frank Palmieri, Ecron Thompson, Eui Kyoon Kim, David Wang, Ken Sotodeh, Kane Jen, Stephen Johnson, Jianjun Hao, Michael Dickey, Yukio Nishimura, Richard Laine, Douglas Resnick, C. Willson
Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.599977
KEYWORDS: Dielectrics, Silicon, Copper, Semiconducting wafers, Optical lithography, Etching, Lithography, Metals, Nanoimprint lithography, Plasma etching

SPIE Journal Paper | 1 January 2005
JM3, Vol. 4, Issue 01, 011002, (January 2005) https://doi.org/10.1117/12.10.1117/1.1862650
KEYWORDS: Lithography, Optical alignment, Photomasks, Nanoimprint lithography, Nanofabrication, Printing, Optical lithography, Etching, Overlay metrology, Polymers

Showing 5 of 13 publications
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