Dr. Michael D. Stewart
Project Coordinator/Research Fellowr at Canon Nanotechnologies Inc
SPIE Involvement:
Author
Publications (13)

Proceedings Article | 21 March 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Lithography, Optical lithography, Annealing, Molecules, Dielectrics, Silicon, Chlorine, Bromine, Back end of line, Front end of line

Proceedings Article | 23 March 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Lithography, Optical lithography, Polymers, Copper, Dielectrics, Silicon, Polymerization, Sol-gels, Liquids, Chemical mechanical planarization

Proceedings Article | 8 November 2005
Proc. SPIE. 5992, 25th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Lithography, Optical lithography, Etching, Quartz, Metals, Copper, Dielectrics, Manufacturing, Photomasks, Semiconducting wafers

Proceedings Article | 6 May 2005
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Lithography, Optical lithography, Etching, Metals, Copper, Dielectrics, Silicon, Plasma etching, Nanoimprint lithography, Semiconducting wafers

SPIE Journal Paper | 1 January 2005
JM3 Vol. 4 Issue 01
KEYWORDS: Lithography, Optical alignment, Photomasks, Nanoimprint lithography, Nanofabrication, Printing, Optical lithography, Etching, Overlay metrology, Polymers

Showing 5 of 13 publications
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