Dr. Michael Switkes
Staff Member at MIT Lincoln Lab
SPIE Involvement:
Author
Publications (14)

Proceedings Article | 15 March 2006 Paper
Proc. SPIE. 6154, Optical Microlithography XIX
KEYWORDS: Wafer-level optics, Optical components, Lithography, Contamination, Capillaries, Particles, Silicon, Laser irradiation, Immersion lithography, Semiconducting wafers

Proceedings Article | 12 May 2005 Paper
Proc. SPIE. 5754, Optical Microlithography XVIII
KEYWORDS: Thin films, Ellipsometry, Lithography, Metrology, Birefringence, Ultraviolet radiation, Optical coatings, Laser irradiation, Spectroscopic ellipsometry, Thin film coatings

Proceedings Article | 12 May 2005 Paper
Proc. SPIE. 5754, Optical Microlithography XVIII
KEYWORDS: Actuators, Lithography, Microfluidics, Sensors, Lens design, Microfluidic imaging, Photomasks, Immersion lithography, Semiconducting wafers, Liquids

SPIE Journal Paper | 1 January 2005
JM3 Vol. 4 Issue 01
KEYWORDS: Semiconducting wafers, Liquids, Thermal effects, Microfluidics, Wafer-level optics, Refraction, Computational fluid dynamics, Optical lithography, Microfluidic imaging, Photomasks

Proceedings Article | 28 May 2004 Paper
Proc. SPIE. 5377, Optical Microlithography XVII
KEYWORDS: Lithography, Scattering, Water, Interfaces, Rayleigh scattering, Raman scattering, Immersion lithography, Semiconducting wafers, Scatter measurement, Liquids

Showing 5 of 14 publications
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