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Michael Tan
at Nikon Research Corp of America
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Author
Publications (4)
Proceedings Article | 10 April 2024 Presentation + Paper
Imaging study of phase shift spatial light modulator for digital scanner
Yoji Watanabe, Yuho Kanaya, Yosuke Okudaira, Shunsuke Kibayashi, Toshiaki Sakamoto, Yasushi Mizuno, Kazuo Masaki, Soichi Owa, Thomas Koo, Bryant Lin, Michael Tan, David Tseng, Conrad Sorensen, Sujuan Li, Stephen Renwick, Noriyuki Hirayanagi, Bausan Yuan
Proceedings Volume 12953, 129530R (2024) https://doi.org/10.1117/12.3010082
KEYWORDS: Spatial light modulators, Micromirrors, Optical lithography, Maskless lithography, Phase shifting
Proceedings Article | 29 September 2023 Paper
Pixel-based data preparation for digital scanner
Yuho Kanaya, Yoji Watanabe, Toshiaki Sakamoto, Yasushi Mizuno, Ryota Matsui, Yosuke Okudaira, Shunsuke Kibayashi, Koshi Komuro, Hiroyuki Tsukamoto, Kazuo Masaki, Soichi Owa, Thomas Koo, David Tseng, Conrad Sorensen, Sujuan Li, Michael Tan, Bryant Lin, Stephen Renwick, Noriyuki Hirayanagi, Bausan Yuan
Proceedings Volume 12915, 129150G (2023) https://doi.org/10.1117/12.2684546
KEYWORDS: Maskless lithography, Direct write lithography, Scanners, Printing, Optical proximity correction, Spatial light modulators, Semiconducting wafers, Photomasks, Raster graphics, Projection systems
SPIE Journal Paper | 5 June 2023
Development of deep ultraviolet optical maskless exposure tool for advanced lithography
JM3, Vol. 22, Issue 04, 041403, (June 2023) https://doi.org/10.1117/12.10.1117/1.JMM.22.4.041403
KEYWORDS: Semiconducting wafers, Spatial light modulators, Deep ultraviolet, Optical proximity correction, UV optics, Solid state lasers, Pulsed laser operation, Lithography, Chip manufacturing, Printing
Proceedings Article | 28 April 2023 Presentation + Paper
Expected performance of digital scanner and the potential application for advanced semiconductor fabrication
Proceedings Volume 12494, 124940A (2023) https://doi.org/10.1117/12.2657730
KEYWORDS: Semiconducting wafers, Scanners, Optical proximity correction, Optical lithography, Laser scanners, Semiconductors, Printing, Solid state lasers, Fabrication, Chip manufacturing
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