Dr. Michael Wagner
at Fraunhofer-Institut für Photonische Mikrosysteme
SPIE Involvement:
Author
Publications (18)

Proceedings Article | 28 February 2020
Proc. SPIE. 11293, MOEMS and Miniaturized Systems XIX
KEYWORDS: Actuators, Mirrors, Optical lithography, Calibration, Micromirrors, CMOS technology, Analog electronics

Proceedings Article | 20 March 2018
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Mirrors, Beam steering, Imaging systems, Scanners, Coating, Laser marking, Microopto electromechanical systems, Micromirrors, Analog electronics, Phased array optics

Proceedings Article | 10 March 2015
Proc. SPIE. 9305, Optical Techniques in Neurosurgery, Neurophotonics, and Optogenetics II
KEYWORDS: Microscopes, Mirrors, Microscopy, Ions, Control systems, Spatial light modulators, Objectives, Micromirrors, Optogenetics, Neodymium

Proceedings Article | 27 February 2015
Proc. SPIE. 9375, MOEMS and Miniaturized Systems XIV
KEYWORDS: Diffraction, Mirrors, Cameras, Sensors, Light scattering, Interferometry, CCD cameras, Micromirrors, Stray light, Scatter measurement

Proceedings Article | 7 March 2014
Proc. SPIE. 8977, MOEMS and Miniaturized Systems XIII
KEYWORDS: Mirrors, Modulation, Silica, Imaging systems, Electrodes, Copper, Laser processing, Laser applications, Semiconductor lasers, Spatial light modulators

Showing 5 of 18 publications
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