Dr. Michael Wagner
at Fraunhofer-Institut für Photonische Mikrosysteme
SPIE Involvement:
Publications (17)

Proceedings Article | 20 March 2018
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Mirrors, Beam steering, Imaging systems, Scanners, Coating, Laser marking, Microopto electromechanical systems, Micromirrors, Analog electronics, Phased array optics

Proceedings Article | 10 March 2015
Proc. SPIE. 9305, Optical Techniques in Neurosurgery, Neurophotonics, and Optogenetics II
KEYWORDS: Microscopes, Mirrors, Microscopy, Ions, Control systems, Spatial light modulators, Objectives, Micromirrors, Optogenetics, Neodymium

Proceedings Article | 27 February 2015
Proc. SPIE. 9375, MOEMS and Miniaturized Systems XIV
KEYWORDS: Diffraction, Mirrors, Cameras, Sensors, Light scattering, Interferometry, CCD cameras, Micromirrors, Stray light, Scatter measurement

Proceedings Article | 7 March 2014
Proc. SPIE. 8977, MOEMS and Miniaturized Systems XIII
KEYWORDS: Mirrors, Modulation, Silica, Imaging systems, Electrodes, Copper, Laser processing, Laser applications, Semiconductor lasers, Spatial light modulators

Proceedings Article | 16 February 2012
Proc. SPIE. 8252, MOEMS and Miniaturized Systems XI
KEYWORDS: Mirrors, Continuous wave operation, Electrodes, Laser applications, Reflectivity, Modulators, Microopto electromechanical systems, Micromirrors, Surface properties, Printed circuit board testing

Proceedings Article | 14 February 2011
Proc. SPIE. 7930, MOEMS and Miniaturized Systems X
KEYWORDS: Mirrors, Interferometers, In situ metrology, Error analysis, Interferometry, Spatial light modulators, Objectives, Microopto electromechanical systems, Micromirrors, Phase shifts

Showing 5 of 17 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top