Dr. Michael E. Walsh
Vice President at LumArray Inc
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 15 November 2005
Proc. SPIE. 6002, Nanofabrication: Technologies, Devices, and Applications II
KEYWORDS: Lithography, Electron beam lithography, Electronics, Nanoparticles, Photons, Electrons, Silicon, Maskless lithography, Zone plates, Nanolithography

Proceedings Article | 6 May 2005
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Lithography, Optical lithography, Modulation, Manufacturing, Modulators, Photomasks, Maskless lithography, Zone plates, Photomicroscopy, Semiconducting wafers

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