Michaela Grosser
Ph.D. Student at Univ des Saarlandes
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | May 19, 2009
Proc. SPIE. 7362, Smart Sensors, Actuators, and MEMS IV
KEYWORDS: Actuators, Thin films, Eye, Sputter deposition, X-ray diffraction, Resistance, Scanning electron microscopy, Tantalum, Thin film deposition, Plasma

PROCEEDINGS ARTICLE | May 19, 2009
Proc. SPIE. 7362, Smart Sensors, Actuators, and MEMS IV
KEYWORDS: Oxides, Glasses, Crystals, X-rays, Ceramics, Composites, Silver, Chemical analysis, Corundum, Temperature metrology

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