Michel L. Cote
Director of Corporate Applications at Cadence Design Systems Inc
SPIE Involvement:
Author
Publications (14)

Proceedings Article | 18 March 2015
Proc. SPIE. 9427, Design-Process-Technology Co-optimization for Manufacturability IX
KEYWORDS: Roads, Diffusion, Manufacturing, Transistors, Semiconductor manufacturing, Physical phenomena, Analog electronics, Tolerancing, Device simulation, Design for manufacturability

Proceedings Article | 13 March 2009
Proc. SPIE. 7275, Design for Manufacturability through Design-Process Integration III
KEYWORDS: Lithography, Data modeling, Scattering, Calibration, Silicon, Manufacturing, Optical proximity correction, Critical dimension metrology, Statistical modeling, Resolution enhancement technologies

Proceedings Article | 19 March 2008
Proc. SPIE. 6925, Design for Manufacturability through Design-Process Integration II
KEYWORDS: Lithography, Data modeling, Etching, Silicon, Shape analysis, Transistors, Molybdenum, Model-based design, Device simulation, Instrument modeling

Proceedings Article | 30 October 2007
Proc. SPIE. 6730, Photomask Technology 2007
KEYWORDS: Lithography, Error analysis, Silicon, Manufacturing, Design for manufacturing, Optimization (mathematics), Optics manufacturing, Electronic design automation, Model-based design, Design for manufacturability

Proceedings Article | 24 March 2006
Proc. SPIE. 6156, Design and Process Integration for Microelectronic Manufacturing IV
KEYWORDS: Lithography, Data modeling, Manufacturing, Design for manufacturing, Photomasks, Optical proximity correction, Integrated circuit design, Optics manufacturing, Resolution enhancement technologies, Design for manufacturability

Showing 5 of 14 publications
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