Michele Belotti
at Univ degli Studi di Pavia
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | February 9, 2005
Proc. SPIE. 5635, Nanophotonics, Nanostructure, and Nanometrology
KEYWORDS: Photon polarization, Waveguides, Polarization, Dispersion, Dielectrics, Silicon, Reflectivity, Photonic crystals, Attenuated total reflectance, Dielectric polarization

PROCEEDINGS ARTICLE | January 27, 2005
Proc. SPIE. 5645, Advanced Microlithography Technologies
KEYWORDS: Polymethylmethacrylate, Etching, Polymers, Ultraviolet radiation, Silicon, Nanoimprint lithography, Reactive ion etching, Semiconducting wafers, Plasma, Liquids

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