Michio Kohno
Senior Engineer at Canon Inc
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 12 July 2006
Proc. SPIE. 6342, International Optical Design Conference 2006
KEYWORDS: Monochromatic aberrations, Mirrors, Iron, Wavefront aberrations, Distortion, Projection systems, Aspheric lenses, Photomasks, Optical alignment, Combined lens-mirror systems

Proceedings Article | 26 June 2003
Proc. SPIE. 5040, Optical Microlithography XVI
KEYWORDS: Reticles, Birefringence, Scanners, Crystals, Optical coatings, Oxygen, Projection systems, Transmittance, Helium, Semiconducting wafers

Proceedings Article | 30 July 2002
Proc. SPIE. 4691, Optical Microlithography XV
KEYWORDS: Wafer-level optics, Optical design, Reticles, Contamination, Birefringence, Scanners, Crystals, Pellicles, Projection systems, Semiconducting wafers

Proceedings Article | 8 August 1993
Proc. SPIE. 1927, Optical/Laser Microlithography
KEYWORDS: Reticles, Optical lithography, Opacity, Particles, Light scattering, Inspection, Pellicles, Photoresist materials, Semiconducting wafers, Device simulation

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